Chemical Solution Deposition of Functional Oxide Thin Films by Theodor Schneller (auth.), Theodor Schneller, Rainer Waser,

By Theodor Schneller (auth.), Theodor Schneller, Rainer Waser, Marija Kosec, David Payne (eds.)

This is the 1st textual content to hide all elements of answer processed useful oxide thin-films. Chemical answer Deposition (CSD) includes all resolution dependent skinny- movie deposition options, which contain chemical reactions of precursors through the formation of the oxide movies, i. e. sol-gel sort routes, metallo-organic decomposition routes, hybrid routes, and so forth. whereas the advance of sol-gel variety methods for optical coatings on glass through silicon dioxide and titanium dioxide dates from the mid-20th century, the 1st CSD derived digital oxide skinny motion pictures, reminiscent of lead zirconate titanate, have been ready within the 1980’s. considering that then CSD has emerged as a hugely versatile and reasonably priced approach for the fabrication of a truly good selection of sensible oxide skinny motion pictures. program components comprise, for instance, built-in dielectric capacitors, ferroelectric random entry thoughts, pyroelectric infrared detectors, piezoelectric micro-electromechanical platforms, antireflective coatings, optical filters, conducting-, obvious conducting-, and superconducting layers, luminescent coatings, fuel sensors, skinny movie solid-oxide gas cells, and photoelectrocatalytic sun cells. within the appendix distinct “cooking recipes” for chosen fabric platforms are offered.

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J Mater Sci 20:4454–4458 86. Spijksma GI, Bouwmeester HJM, Blank DHA, Kessler VG (2004) Stabilization and destabilization of zirconium propoxide precursors by acetylacetone. Chem Commun 2004:1874–1875 87. Errington RJ, Ridland J, Clegg W, Coxall RA, Sherwood JM (1998) Beta-diketonate derivatives of titanium alkoxides: X-ray crystal structures and solution dynamics [{Ti(OR)3(dik)}2]. Polyhedron 17:659–674 88. Bharara PC, Gupta VD, Mehrotra RC (1974) Reactions of titanium alkoxides with N-methylaminoalcohols.

3 lists the various factors that affect the sensitivity for some common cations. A large positive partial charge corresponds to a rapid reaction rate for the transition metal alkoxides compared to the silicon alkoxides with similar organic residues. Thus the hydrolysis of the latter has to be typically accelerated by acid or base catalysts. e. the difference between the usual coordination number and the valence z of the corresponding metal cation is a more simple reactivity criterion. 75 Ce 8 4 Ce(OiPr)4a Data from [65] a Cerium alkoxides are extremely sensitive to humidity.

Bharara PC, Gupta VD, Mehrotra RC (1974) Reactions of titanium alkoxides with N-methylaminoalcohols. Z Anorg Allg Chem 403:337–346 89. Losego MD, Ihlefeld JF, Maria J (2008) Importance of solution chemistry in preparing sol-gel PZT thin films directly on copper surfaces. Chem Mater 20:303–307 90. Halder S, Schneller T, Waser R (2005) Crystallization temperature limit of (Ba,Sr)TiO3 thin films prepared by a nonoxocarbonate phase forming CSD route. J Sol-Gel Sci Technol 33:299–306 91. Kim SH, Kim DJ, Hong JG, Streiffer SK, Kingon AI (1999) Imprint and fatigue properties of chemical solution derived Pb1-xLax(ZryTi1-y)1-x/4O3 thin films.

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